The group's principal activity is the design, manufacture, market and support of thin film metrology systems for the semiconductor, flat panel display and magnetic recording head industries. these metrology systems precisely measure a wide range of film types deposited on substrates during manufacturing in order to control manufacturing processes and increase production yields in the fabrication. the thin film metrology systems use a broad spectrum of wavelengths, high-sensitivity optics, proprietary software and patented technology to measure the thickness and uniformity of films deposited on silicon and other substrates as well as their chemical composition. metrology systems are categorized into three segments, namely automated systems, integrated systems and tabletop systems. automated systems accounted for 58% of 2001 revenues; Integrated systems, 16%; Tabletop systems, 16% & service income, 10%.